仪器设备

Harrick PDC-FMG-2气体混合器

等离子设备

型号:PDC-FMG-2 

产品资料下载:  PDC-FMG-2

购买联系:sales@juxinmems.com

解决方案:在等离子清洗过程中气体流混合和压力监,为向舱内注入两种气体提供了可能


详细信息

Harrick Plasma是国际一流的等离子清洗器生产商,在业内已经有三十多年的经验。他所生产的小型等离子清洗器结构紧凑、质量可靠、价格合理;广泛地被大中院校、科研机构、企业研发机构和实验室采用。其产品主要应用在材料科学、高分子科学、生物医药材料学、微流体研究、微电子机械系统研究、光学、显微术、牙科医疗等领域中的污染物清除、表面活化、粘合前处理、表面化学改性、聚合物移植或表面涂覆等方面。该产品能处理塑料、生化材料、PDMS、玻璃或金属半导体、陶瓷、复合材料、高分子聚合物等材料,并对所处理的材料表面带来表面超洁净、杀菌、提高湿润性转变、表面性质改变、提高结合力等处理效果。

气体计量混合器PlasmaFloTM
功能及配置简介:
1、Harrick  PlasmaFloTM气体计量混合器是一台可任选的以满足客户的不同需求的备件。主要应用于样品的表面改性。
2、在等离子清洗过程中气体流混合和压力监视。
3、为向舱内注入两种气体提供了可能。
4、含两个标准的气体流量计(1.0 SCFH & 2.0 SCFH)
5、温差电偶真空度表测量舱内压力
6、适用气体:空气、氮气、氩气或混合气体。
7、尺寸:8 1/2"H x 10"W x 8"D
8、订货号:PDC-FMG-2 

 

PLASMAFLO GAS MIXER

PDC-FMG (115V) | PDC-FMG-2 (230V)

Harrick PlasmaAccessories→PlasmaFlo Gas Flow Mixer

The PlasmaFlo is an optional accessory that may be used with any of our plasma cleaners. The PlasmaFlo provides more precise, quantitative control of the gas flowrate and monitoring of vacuum pressure, both of which are beneficial for process consistency. A second gas source can also be added without having to manually swap gas line.

FEATURES

Dual gas feeds for gas mixing or independent control of two process gases
Dual process gas flowmeters
49 mL/min maximum flowrate for atmospheric air at 0 psig*
± 2% full scale accuracy
Thermocouple vacuum gauge sensor connects to plasma cleaner door
Digital meter displays pressure range of 1 mTorr to 760 Torr
Weight: 7 lbs
Size: 8.5″ H x 10″ W x 8″ D

* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available. Please inquire.